Review of HIT - IE-BAS joint research during the last 25 years

URI http://harp.lib.hiroshima-u.ac.jp/it-hiroshima/metadata/12394
File
Title
Review of HIT - IE-BAS joint research during the last 25 years
Author
氏名 田中 武
ヨミ タナカ タケシ
別名 Takeshi TANAKA
氏名 Katia VUTOVA
ヨミ
別名
Subject
joint research, Institute of electronics at the Bulgarian Academy of Sciences, Hiroshima Institute of Technology
Abstract

The Department of Electronics and Computer Engineering, Hiroshima Institute of Technology (EC-HIT) started the international joint research with the Laboratory “Physical Problems of Elec-tron Beam technologies” of the Institute of Electronics, Bulgarian Academy of Sciences (IEBAS) in 1994. More than 30 papers, included a book chapter, were published by implementing the international joint research under 7 Agreements for Academic Cooperation and Exchange between HIT and IE-BAS. Our international joint research is getting the important position in joint research between Japan and Bulgaria. The semiconductor fabrication process such as thin film deposition, Electron and Ion Lithography, Etching, Ion implantation, Plasma treatment, etc., evaluation technique such as X-ray photo-electron spectroscopy, optical spectroscopy, X-ray diffraction, etc., and their simulation technology were used for application in industry, medical service, medicine manufacture, biotechnology, dental, etc. By providing further steps for developing and extending our bilateral relations, this research partnership between the Hiroshima Institute of Technology and the Institute of electronics at the Bulgarian Academy of Sciences can become more stable in the future.

Journal Title
広島工業大学紀要. 研究編
Volume
55
Spage
95
Epage
100
Published Date
21-Feb
Publisher
広島工業大学
ISSN
1346-9975
NCID
AA11599110
Language
jpn
NIIType
Departmental Bulletin Paper
Text Version
出版社版
Set
it-hiroshima