プラズマ材料プロセス/希薄気体統合シミュレーションツール(PEGASUS)の電磁気学への応用

URI http://harp.lib.hiroshima-u.ac.jp/it-hiroshima/metadata/3795
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Title
プラズマ材料プロセス/希薄気体統合シミュレーションツール(PEGASUS)の電磁気学への応用
Title Alternative
Application of Plasma Enhanced Materials Processing and Rarefild GAS Dynamics Unified Simulation Tools (PEGASUS) to Electromagnetics
Author
氏名 田中 武
ヨミ タナカ タケシ
別名 Tanaka Takeshi
氏名 高崎 敏英
ヨミ タカサキ トシヒデ
別名 Takasaki Toshihide
氏名 田中 正明
ヨミ タナカ マサアキ
別名 Tanaka Masaaki
氏名 野島 洋一
ヨミ ノジマ ヨウイチ
別名 Nojima Youichi
NDC
549.7
Abstract

Plasma Enhanced materials processing and rarefied GAS dynamics Unified Simulation tools(PEGASUS) was introduced and its application to electromagnetic was described. The result of semiconductor process simulation using application program (PEGASUS) concerning to the electromagnetic was shown. It was found that the difference of the viewpoint between theory and application of electromagnetic. It was shown that the possibility of extension of lecture's content at the university using the application program concerned with the electromagnetic.

Journal Title
広島工業大学紀要. 教育編
Volume
2
Spage
5
Epage
8
Published Date
2003
Publisher
広島工業大学
ISSN
13469983
NCID
AA11599121
Language
jpn
NIIType
Departmental Bulletin Paper
Text Version
出版社版
Old URI
Set
it-hiroshima