YAGレーザーによる微細加工の研究

URI http://harp.lib.hiroshima-u.ac.jp/it-hiroshima/metadata/7106
File
Title
YAGレーザーによる微細加工の研究
Title Alternative
A Study on Micro Material Processing by YAG Laser
Author
氏名 矢野 雅昭
ヨミ ヤノ マサアキ
別名 Yano Masaaki
氏名 越智 秋雄
ヨミ オチ アキオ
別名 Ochi Akio
氏名 中本 修樹
ヨミ ナカモト シュウキ
別名 Nakamoto Syuuki
氏名 池内 隆
ヨミ イケウチ タカシ
別名 Ikeuchi Takashi
Subject
Laser wavelength dependence
the micro laser material processing
Q-switched YAG laser
second and forth harmonic light pulses.
NDC
431.57
Abstract

The laser wavelength dependence on the micro laser material processing mechanism is investigated. Several material targets were irradiated by the focused Q-switched YAG laser and its second and forth harmonic light pulses. After the laser pulses irradiated,a small hole of the focused laser light beam diameter was observed on the target surface. The depth of holes increase in the shorter wavelength laser pulses irradiation

Journal Title
広島工業大学紀要. 研究編
Volume
36
Spage
31
Epage
35
Published Date
Feb-02
Publisher
広島工業大学
ISSN
13469975
NCID
AA11599110
Language
jpn
NIIType
Departmental Bulletin Paper
Text Version
出版社版
Relation URL
Old URI
Set
it-hiroshima