三本爪ダイヤフラムチャックを用いた精密位置決めに関する研究

URI http://harp.lib.hiroshima-u.ac.jp/it-hiroshima/metadata/7125
File
Title
三本爪ダイヤフラムチャックを用いた精密位置決めに関する研究
Title Alternative
Study on Precision Positioning using a Diaphragm Chuck with Three Jaws
Author
氏名 片山 剛之丞
ヨミ カタヤマ ゴウノジョウ
別名 Ktayama Gonojo
氏名 一色 桂
ヨミ イッシキ ケイ
別名 Isshiki Kei
Subject
automatic precision positioning
piezoelectric element
CCD camera
micro motion mechanism
diaphragm chuck
NDC
532
Abstract

The purpose of this study is to automatically position a workpiece model at an arbitrary point with high precision. For precision positioning with a gripped workpiece model,the diaphragm chuck has a piezoelectric element in each of the three jaws. Despite the disadvantages of narrow-range movement and hysteresis,the piezoelectric element is popular for use in fine adjustment because of the advantages of compactness,high resolution,good responsiveness,and control at an applied voltage. The workpiece model position was measured using a CCD camera. The CCD camera allowed quick position measurement. A voltage was applied to the piezoelectric elements to excite them as actuators for the automatic precision positioning of a workpiece model gripped by the diaphragm chuck with three jaws. Displacement to the target position was set to 7μm for positioning. Consequently,precision positioning with an error of within 0.39μm was realized in any direction.

Journal Title
広島工業大学紀要. 研究編
Volume
38
Spage
61
Epage
66
Published Date
Feb-04
Publisher
広島工業大学
ISSN
13469975
NCID
AA11599110
Language
jpn
NIIType
Departmental Bulletin Paper
Text Version
出版社版
Relation URL
Old URI
Set
it-hiroshima