三本爪ダイヤフラムチャックを用いた精密位置決めに関する研究
URI | http://harp.lib.hiroshima-u.ac.jp/it-hiroshima/metadata/7125 | ||||||||||||
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ファイル |
kenkyuhen38061.pdf
( 362.0 KB )
公開日
:2010-11-10
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タイトル |
三本爪ダイヤフラムチャックを用いた精密位置決めに関する研究
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別タイトル |
Study on Precision Positioning using a Diaphragm Chuck with Three Jaws
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著者 |
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キーワード |
automatic precision positioning
piezoelectric element
CCD camera
micro motion mechanism
diaphragm chuck
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NDC |
532
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抄録 |
The purpose of this study is to automatically position a workpiece model at an arbitrary point with high precision. For precision positioning with a gripped workpiece model,the diaphragm chuck has a piezoelectric element in each of the three jaws. Despite the disadvantages of narrow-range movement and hysteresis,the piezoelectric element is popular for use in fine adjustment because of the advantages of compactness,high resolution,good responsiveness,and control at an applied voltage. The workpiece model position was measured using a CCD camera. The CCD camera allowed quick position measurement. A voltage was applied to the piezoelectric elements to excite them as actuators for the automatic precision positioning of a workpiece model gripped by the diaphragm chuck with three jaws. Displacement to the target position was set to 7μm for positioning. Consequently,precision positioning with an error of within 0.39μm was realized in any direction. |
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掲載雑誌名 |
広島工業大学紀要. 研究編
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巻 |
38
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開始ページ |
61
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終了ページ |
66
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出版年月日 |
Feb-04
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出版者 |
広島工業大学
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ISSN |
13469975
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NCID |
AA11599110
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本文言語 |
日本語
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資料タイプ |
紀要論文
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著者版フラグ |
出版社版
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旧URI | |||||||||||||
区分 |
it-hiroshima
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