マイクロホロー陰極放電の放電開始電圧の気圧依存性の検討

URI http://harp.lib.hiroshima-u.ac.jp/kure-nct/metadata/7902
File
Title
マイクロホロー陰極放電の放電開始電圧の気圧依存性の検討
Title Alternative
Investigation of Gas pressure Dependence of Breakdown Voltages of a Micro-hollow Cathode Discharge
Author
氏名 山崎 勉
ヨミ ヤマサキ ツトム
別名 Yamasaki Tsutomu
Subject
Paschen curve
micro-hollow cathode discharge
electron attachment
Penning ionization
パッシェン曲線
マイクロホロー陰極放電
電子付着
ペニング電離
Abstract

The gas pressure dependence of breakdown voltages of a micro-hollow cathode discharge is investigated.Experiments were carried out on a cylindrical hollow cathode,0.5 mm in diameter and 3 mm in depth in wide range of gas pressure of helium and its mixtures.Calculated Paschen curve based on Townsend theory were compared with the experimental results.The influences of admixed hydrogen and water vapor on the breakdown voltage ware considered by the modification of the ionization coefficient.The ionization by Penning collision between a hydrogen molecule and a helium excited atom is included by the addition of excitation coefficient to the ionization corefficient.The electron attachment with a water vapor is treated as the decrease of electrons contributive to ionization and the decrease of positive ions to the cathode surface contributive to the secondary electron emission.

Journal Title
呉工業高等専門学校研究報告
Issue
72
Spage
29
Epage
34
Published Date
2010
Publisher
呉工業高等専門学校
ISSN
0286-4037
Language
jpn
NIIType
Departmental Bulletin Paper
Text Version
出版社版
Old URI
Set
kure-nct