大気圧水素混合ヘリウムグロー放電の気体温度と電子密度の測定

URI http://harp.lib.hiroshima-u.ac.jp/kure-nct/metadata/8029
ファイル
タイトル
大気圧水素混合ヘリウムグロー放電の気体温度と電子密度の測定
別タイトル
Measurement of Gas Temperature and Electron Density in an Atmospheric Glow Discharge in Helium and Hydrogen Mixture
著者
氏名 山崎 勉
ヨミ ヤマサキ ツトム
別名 Yamasaki Tsutomu
キーワード
gas temperature
electron density
atmospheric pressure discharge
micro-hollow cathode
gas mixture
気体温度
電子密度
大気圧放電
マイクロホロー陰極
混合気体
抄録

In this report,experimental results on gas temperatures and electron densities in sub-atmospheric pressure glow discharge in helium with 1% hydrogen mixture are presented.Experiments were carried out with micro-plasma generated in a micro-hollow cathode discharge,0.5mm in diameter and 3.0mm in length of cylindrical hollow drilled in the metal and ceramics sandwich structure by emission spectroscopy.To derive gas temperature and electron density,spectral line shapes analysis were carried out considering pressure broadening,such as resonance or van der Waals,Stark broadening and Doppler broadening of helium line spectra of 667.8nm and hydrogen H-alpha 656.3nm.Obtained results showed qualitatively good agreement with other reports at higher gas pressure over 20kPa.Gas temperature grows from 300K at 20kPa linearly to 600K at 100kPa.Electron density grows from 0.5×10 14 cm -3 at 20kPa to 3.0×10 14 cm -3 at 100kPa.And at lower pressure than 20kPa,electron temperature increased with decrease of gas pressure.

掲載雑誌名
呉工業高等専門学校研究報告
71
開始ページ
15
終了ページ
20
出版年月日
2009
出版者
呉工業高等専門学校
ISSN
0286-4037
本文言語
日本語
資料タイプ
紀要論文
著者版フラグ
出版社版
旧URI
区分
kure-nct