ホロー陰極型電極によるヘリウム大気圧グロー放電の生成

URI http://harp.lib.hiroshima-u.ac.jp/kure-nct/metadata/8467
ファイル
タイトル
ホロー陰極型電極によるヘリウム大気圧グロー放電の生成
別タイトル
Generation of Atmospheric Pressure Helium Glow Discharge using Hollow Cathode Type Electrodes System
著者
氏名 山崎 勉
ヨミ ヤマサキ ツトム
別名 Yamasaki Tsutomu
キーワード
glow discharge
atmospheric pressure helium
hollow cathode
hollow cathode effect
normal glow mode
グロー放電
大気圧ヘリウム
ホロー陰極
ホロー陰極効果
正規グロー様式
抄録

In this report, experimental results on the generation of atmospheric pressure helium glow discharge and its fundamental properties are presented. Hollow cathode type electrodes system, 0.5mm in diameter and 3.0mm in length of cylindrical hollow made of brass is tested to generate micro plasma in the mode of glow discharge. Breakdown voltages were measured as a function of helium gas pressure up to 120kPa and compared with the results in air. In the case of helium, dc voltages less than 1kV can generate glow discharges in the hollow cathode. Current-voltage characteristic obtained showed two regions with property of negative differential resistance, due to the hollow cathode effect at low pressure and developing to normal glow mode at about atmospheric pressure. Using appearances of optical emission at cathode end changed with discharge current, normal glow current density calculated of 21 μ A/cm-2/Torr-2 were qualitatively in good agreement with other authors' reports.

掲載雑誌名
呉工業高等専門学校研究報告
69
開始ページ
69
終了ページ
73
出版年月日
2007
出版者
呉工業高等専門学校
ISSN
0286-4037
NAID
110006456430
本文言語
日本語
資料タイプ
紀要論文
著者版フラグ
出版社版
旧URI
区分
kure-nct