小型ホロー陰極内プラズマの電子温度測定

URI http://harp.lib.hiroshima-u.ac.jp/kure-nct/metadata/8492
ファイル
タイトル
小型ホロー陰極内プラズマの電子温度測定
別タイトル
Measurement of Electron Temperature in a Miniature Hollow Cathode
著者
氏名 山崎 勉
ヨミ ヤマサキ ツトム
別名 Yamasaki Tsutomu
キーワード
hollow cathode
electron temperature
air glow discharge
negative glow plasma
ホロー陰極
電子温度
空気グロー放電
負グロープラズマ
抄録

Experimental results on micro-hollow cathode discharge are presented. First, breakdown voltages in air glow discharge and current-voltage characteristics are examined with a hollow cathode, 0.8mm in diameter and 3mm depth separated by ceramic insulator of 1mm thickness. Then electron temperatures and rotational temperatures in negative glow plasma in hollow cathode are measured by optical emission spectroscopy, intensity ratio of hydrogen line-spectra and spectral intensity distribution of nitrogen first negative band respectively. Electron temperatures measured decreased from 2eV to 0.5eV, increasing discharge current from 10mA to 120mA at about a few kilo-Pa. And gas temperature, corresponding to rotational temperature increased from 0.03eV to 0.14eV with the same increase of current. But with collisional-radiative model, calculated electron temperatures, from 5eV to 1eV for the same current decrease, are higher than experimentally obtained result. This difference means that negative glow plasma does not attain in thermo-dynamical equilibrium.

掲載雑誌名
呉工業高等専門学校研究報告
66
開始ページ
51
終了ページ
55
出版年月日
2004
出版者
呉工業高等専門学校
ISSN
0286-4037
NAID
110004303626
本文言語
日本語
資料タイプ
紀要論文
著者版フラグ
出版社版
旧URI
区分
kure-nct